Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 17, 2007
Patent Application Number
10630300
Date Filed
July 30, 2003
Patent Primary Examiner
Patent abstract
A remover composition and method for removing resists from substrates containing nucleophilic amine and at least one solvent is described. Optionally, a chelating agent can also be included in the remover composition. The remover composition is especially suitable for removing a variety of resists from substrates at different stages in the process of manufacturing integrated circuits.
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