US Patent 7205556 Bellows liner for an ion beam implanter
Patent 7205556 was granted and assigned to Axcelis Technologies on April, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 1, 2004
0
Date of Patent
April 17, 2007
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Patent Application Number
10956817
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Patent Inventor Names
Alexander S. Perel
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Scott T. Barusso
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Lyudmila Stone
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Dale K. Stone
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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