Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
April 24, 2007
Patent Application Number
11150868
Date Filed
June 10, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide range of pressures ranging from atmospheric pressures to ultrahigh vacuum by processing the readings from an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor), a differential low vacuum gauge providing a differential relative to ambient pressure (e.g., a diaphragm sensor), and a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading is used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure.
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