US Patent 7208065 Structure for measuring the etching speed
Patent 7208065 was granted and assigned to Industrial Technology Research Institute on April, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 25, 2004
Date of Patent
April 24, 2007
Patent Application Number
10875306
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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