Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 1, 2007
Patent Application Number
11042195
Date Filed
January 26, 2005
Patent Primary Examiner
Patent abstract
An exposure apparatus including a pulse light source, an exposure unit which exposes a substrate to a pattern with light from the pulse light source, a determination unit which determines necessity of maintenance for the pulse light source based on a pulse rate of the pulse light source within a predetermined period of time, and a decision unit which decides a timing of the maintenance based on a determination result of the determination unit.
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