US Patent 7212328 Electron-beam actuated light modulator with a mechanical stop

An electron beam actuated light modulator, including an actuatable mirror element carried by a pedestal and hinge portion, having an electrostatically more neutral first position and an electrostatically more charged second position, the mirror being actuatable in a first direction from the first position to the second position by charge accumulation, and is actuatable in a second direction from the second position to the first position by dissipation of the charge accumulation and a stop element positioned adjacent the mirror element in the first position, configured to limit movement of the mirror element in the second direction after the mirror reaches the first position traveling in the second direction.