Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vincent J. McGahay0
Michael W. Lane0
Peter E. Biolsi0
Theodorus E. Standaert0
Bernd E. Kastenmeier0
Habib Hichri0
Jeffrey R. Marino0
Lawrence A. Clevenger0
...
Date of Patent
May 8, 2007
Patent Application Number
10710706
Date Filed
July 29, 2004
Patent Primary Examiner
Patent abstract
Methods for sealing an organic ILD layer and a metal layer after an etching step. The method includes etching through an ILD layer and leaving a remaining portion of an underlying metal layer cap, maintaining the device in an inert gas, and depositing at least a portion of a liner into the opening to seal the ILD layer and the metal layer. Subsequent processing may include formation of a via by etching through the portion of the liner and the remaining portion of the cap layer, and depositing a metal.
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