Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
May 8, 2007
Patent Application Number
10789800
Date Filed
February 27, 2004
Patent Primary Examiner
Patent abstract
In one embodiment, a method includes providing a semiconductor substrate that includes a memory container having a double-sided capacitor. The method also includes vapor phase etching a layer adjacent to the side wall of the memory container with a vapor having a surface tension lowering agent.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
