Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Torbjorn Sandstrom0
Date of Patent
May 8, 2007
Patent Application Number
10505564
Date Filed
February 13, 2003
Patent Primary Examiner
Patent abstract
The present invention relates to an apparatus for forming a pattern on a radiation sensitive material comprising a source to form a radiation beam, a scanning element to scan at least one beam from said radiation source over said radiation sensitive material, a modulator to modulate said at least one beam during scanning according to an input pattern data file, where said modulation of the beam creates a coherent sub-image on the workpiece and several sub-images are non-coherently superposed to create a final image. The invention also relates to a method of patterning a workpiece and a workpiece as such.
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