Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 8, 2007
Patent Application Number
10860617
Date Filed
June 2, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
Disclosed is an image processing system for analyzing images of a specimen to determine whether the specimen contains defects. The system includes a plurality of processors for receiving image data from a specimen and for analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect. The system also includes a plurality of buses for coupling the processors together, wherein the bus has the following specifications: a data rate of about 50 gigabits per second or more and an error rate less than about 10−16. In one implementation, the buses are low voltage differential signal type buses, and in another implementation, the buses are hyper transport type buses.
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