US Patent 7216539 Micromachined apparatus with split vibratory masses

Patent 7216539 was granted and assigned to Analog Devices on May, 2007 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Analog Devices

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

72165390

Patent Inventor Names

John A. Geen0

Date of Patent

May 15, 2007

Patent Application Number

113608480

Date Filed

February 23, 2006

Patent Primary Examiner

‌

Helen Kwok

Patent abstract

Each of a number of resonator masses is split into two separate lobes or masses joined together by a short flexure. The short flexure allows the separate lobes or masses to rotate slightly as they resonate so as to substantially relieve longitudinal stresses in certain resonator structures.

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