Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 15, 2007
Patent Application Number
11502011
Date Filed
August 10, 2006
Patent Primary Examiner
Patent abstract
A cleaning method for removing foreign bodies during the fabrication of semiconductor devices including treating a substrate with a cleaning solution including an oxidizer to form a chemical oxide layer and then removing the chemical oxide layer, thereby removing foreign bodies from a surface of the semiconductor substrate. Accordingly, the foreign bodies can be substantially removed from the surface of the substrate without corroding a metal.
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