US Patent 7217371 Optical control interface between controller and process chamber
Patent 7217371 was granted and assigned to Lightwind on May, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Herbert E. Litvak0
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Patent abstract
The present invention relates to interfacing new sensors to incumbent controls. In particular, it relates to optically interfacing a new sensor, such as a spectrometer with plasma generator, to an incumbent electro-optical sensor. Logic and resources to control activation of the incumbent electro-optical sensor may be included. Particular aspects of the present invention are described in the claims, specification and drawings.
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US Patent 07217371 Optical control interface between controller and process chamber US Patent 7217371 Optical control interface between controller and process chamber
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Patent Number
07217371
Patent Number
7217371
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US Patent 07217371 Optical control interface between controller and process chamber
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Is a
Current assignee
Patent jurisdiction
Patent number
07217371
Date of patent
May 15, 2007
Patent application number
10898891
Date Filed
July 26, 2004
Patent primary examiner
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