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US Patent 7217670 Dummy substrate for thermal reactor
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Patent
Date Filed
November 22, 2004
Date of Patent
May 15, 2007
Patent Application Number
10995904
Patent Citations Received
US Patent 12137601 In-line monitoring of OLED layer thickness and dopant concentration
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US Patent 11851760 PECVD deposition system for deposition on selective side of the substrate
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US Patent 11946142 Spatially tunable deposition to compensate within wafer differential bow
0
US Patent 11976369 Low-temperature/BEOL-compatible highly scalable graphene synthesis tool
0
Patent Inventor Names
Tom A. van Kesteren
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
7217670
Patent Primary Examiner
Michelle Estrada
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