US Patent 7218382 Load-lock technique
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Patent abstract
A load-lock system which includes a chamber housing and a capacity changing system for continuously changing the capacity of the chamber housing.
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US Patent 07218382 Load-lock technique US Patent 7218382 Load-lock technique
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Patent Number
0721838200
Patent Number
721838200
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Is a
Patent Jurisdiction
Patent Number
072183820
Date of Patent
May 15, 2007
0Patent Application Number
109991370
Date Filed
November 30, 2004
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
072183820
Date of Patent
May 15, 2007
0Patent Application Number
109991370
Date Filed
November 30, 2004
0Official Website
Patent Primary Examiner
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US Patent 07218382 Load-lock technique
Infobox
Is a
Patent jurisdiction
Patent number
07218382
Date of patent
May 15, 2007
Patent application number
10999137
Date Filed
November 30, 2004
Patent primary examiner
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