US Patent 7218383 Holding system, exposure apparatus, and device manufacturing method
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Patent Inventor Names
Shin Matsui0
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Patent abstract
A holding system, provided on a movable stage, for holding an object from above, against gravity. The holding system includes at least one holding portion adapted to be in contact with the object, to hold the object from above, and at least one attracting portion for attracting a limited portion of the object upwardly, without contact thereto.
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US Patent 07218383 Holding system, exposure apparatus, and device manufacturing method US Patent 7218383 Holding system, exposure apparatus, and device manufacturing method
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Patent Number
072183830
Patent Number
72183830
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Patent Jurisdiction
Patent Number
072183830
Date of Patent
May 15, 2007
0Patent Application Number
115557110
Date Filed
November 2, 2006
0Official Website
Patent Primary Examiner
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US Patent 07218383 Holding system, exposure apparatus, and device manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07218383
Date of patent
May 15, 2007
Patent application number
11555711
Date Filed
November 2, 2006
Patent primary examiner
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