US Patent 7218826 CMOS process active waveguides on five layer substrates
Patent 7218826 was granted and assigned to Luxtera on May, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 29, 2005
Date of Patent
May 15, 2007
Patent Application Number
11214704
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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