US Patent 7218985 Semiconductor manufacturing apparatus
Patent 7218985 was granted and assigned to Hitachi on May, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 8, 2006
0
Date of Patent
May 15, 2007
0
Patent Application Number
11371677
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Patent Inventor Names
Rikio Tomiyoshi
0
Hidemitsu Naya
0
Koji Hashimoto
0
Masamichi Kawano
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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