Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshinobu Goto0
Hideyoshi Tsuruta0
Date of Patent
May 22, 2007
0Patent Application Number
107536250
Date Filed
January 8, 2004
0Patent Primary Examiner
Patent abstract
The present invention provides members that are provided around a susceptor for mounting a semiconductor in a chamber for a semiconductor production system. Each member has a function of independently generating heat to heat the semiconductor, at least by radiation, and preferably, a heat generating element is embedded in each member.
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