Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nobutaka Kunimi0
Akinori Nakano0
Jun Kawahara0
Keizo Kinoshita0
Date of Patent
May 22, 2007
Patent Application Number
11153604
Date Filed
June 16, 2005
Patent Primary Examiner
Patent abstract
A polymer film having a low dielectric constant is produced polymerizing a raw material gas containing a compound of the formula (1):
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