Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yong Sung Ham0
Yun Bok Lee0
Date of Patent
May 29, 2007
0Patent Application Number
107366770
Date Filed
December 17, 2003
0Patent Primary Examiner
Patent abstract
Disclosed is an ion beam irradiation device including a holder supporting a substrate; and an ion beam source that is a predetermined distance from the substrate and inclined to be substantially parallel with the substrate and that irradiates the substrate with an ion beam.
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