Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 29, 2007
Patent Application Number
10984836
Date Filed
November 10, 2004
Patent Primary Examiner
Patent abstract
An elastic boundary wave device includes a first piezoelectric substrate, IDTs arranged thereon, a first dielectric film having a smoothed surface that covers the IDTs, a second substrate that is a silicon-based substrate, and a second dielectric film provided on a main surface of the second substrate. The smoothed surface of the first dielectric surface and a surface of the second dielectric film are joined together.
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