Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gökhan Perçin0
Abdurrahman Sezginer0
Franz Xaver Zach0
Date of Patent
May 29, 2007
0Patent Application Number
111418030
Date Filed
May 31, 2005
0Patent Primary Examiner
Patent abstract
An apparatus and method for characterizing an illumination pupil of an exposure tool comprises forming a plurality of pinhole test patterns at a plurality of test site locations to facilitate locating test pattern edges for extracting therefrom the illumination pupil characteristics of the exposure tool.
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