US Patent 7224708 Focused ion beam heater thermally tunable laser
Patent 7224708 was granted and assigned to The Aerospace Corporation on May, 2007 by the United States Patent and Trademark Office.
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Patent abstract
Platinum (Pt) thin film heaters are deposited by a focused ion beam for semiconductor manufacturing of thermally tunable distributed feedback lasers. An exemplar 1.3 μm InGaAsP/InP laser is integrated with a tuning element having a wide wavelength tuning range of 4.9 nm, that is, 857 GHz, with a small heater current of 13.0 mA.
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US Patent 07224708 Focused ion beam heater thermally tunable laser US Patent 7224708 Focused ion beam heater thermally tunable laser
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Patent Number
0722470800
Patent Number
722470800
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Current Assignee
Patent Jurisdiction
Patent Number
072247080
Date of Patent
May 29, 2007
0Patent Application Number
109298600
Date Filed
August 30, 2004
0Official Website
Patent Primary Examiner
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072247080
Date of Patent
May 29, 2007
0Patent Application Number
109298600
Date Filed
August 30, 2004
0Official Website
Patent Primary Examiner
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US Patent 07224708 Focused ion beam heater thermally tunable laser
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07224708
Date of patent
May 29, 2007
Patent application number
10929860
Date Filed
August 30, 2004
Patent primary examiner
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