Patent attributes
A stacked piezoelectric element is produced by alternately stacking a piezoelectric layer and an inner electrode layer. The method includes producing a green sheet 110 for a base, forming a unit body 3 having a narrow stacked part 30 where a narrow piezoelectric material layer 115 having an area smaller than the green sheet 110 for base and an electrode material layer 20 having an area smaller than the green sheet 110 for base are stacked, the unit body being formed by disposing the narrow stacked part 30 on the green sheet 110 for base; forming a stacked body having groove parts by stacking a plurality of the unit bodies 3, the groove part having the bottom being defined by the side face of the narrow stacked part 30; and firing the stacked body.
