Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 5, 2007
Patent Application Number
10890261
Date Filed
July 14, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
An inkjet head is provided and includes: a chamber substrate for forming an ink flow passage; a diaphragm substrate including a diaphragm for pressurizing a pressure chamber disposed in the chamber substrate; and a nozzle substrate for jetting ink pressurized by the diaphragm, wherein the diaphragm substrate is made of silicon, the diaphragm is made of a material selected from the group of silicon oxide film and metal film, and the diaphragm is formed in the diaphragm substrate. A method of manufacturing the inkjet head is also provided.
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