Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 5, 2007
Patent Application Number
10957839
Date Filed
October 5, 2004
Patent Primary Examiner
Patent abstract
In an electron source manufacturing apparatus, the quantity of heat generated from an electron source substrate is measured. A temperature of a support member for the electron source substrate is controlled based on the measured quantity of heat generated. A variation in performances of electron source substrates is suppressed, which increase their life.
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