US Patent 7226339 Spectrum based endpointing for chemical mechanical polishing
Patent 7226339 was granted and assigned to Applied Materials on June, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 26, 2005
Date of Patent
June 5, 2007
Patent Application Number
11213674
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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