US Patent 7227097 Plasma generation and processing with multiple radiation sources
Patent 7227097 was granted and assigned to BTU International on June, 2007 by the United States Patent and Trademark Office.
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Patent abstract
Plasma-assisted methods and apparatus that use multiple radiation sources are provided. In one embodiment, a plasma is ignited by subjecting a gas in a processing cavity to electromagnetic radiation having a frequency less than about 333 GHz in the presence of a plasma catalyst, which may be passive or active. A controller can be used to delay activation of one radiation source with respect to another.
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US Patent 07227097 Plasma generation and processing with multiple radiation sources US Patent 7227097 Plasma generation and processing with multiple radiation sources
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Patent Number
0722709700
Patent Number
722709700
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072270970
Date of Patent
June 5, 2007
0Patent Application Number
104304150
Date Filed
May 7, 2003
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072270970
Date of Patent
June 5, 2007
0Patent Application Number
104304150
Date Filed
May 7, 2003
0Official Website
Patent Primary Examiner
Edits on 15 Jun, 2022
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US Patent 07227097 Plasma generation and processing with multiple radiation sources
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07227097
Date of patent
June 5, 2007
Patent application number
10430415
Date Filed
May 7, 2003
Patent primary examiner
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