Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jeroen Johannes Sophia Maria Mertens0
Joost Jeroen Ottens0
Koen Jacobus Johannes Maria Zaal0
Date of Patent
June 5, 2007
0Patent Application Number
108148150
Date Filed
April 1, 2004
0Patent Primary Examiner
Patent abstract
A burl plate for use in immersion lithography has a higher burl density in a peripheral portion than in a medial portion so that when a higher pressure differential is applied in the peripheral portion the compression of the burls in the peripheral portion is substantially the same as in the medial portion.
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