Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mitsuru Yokoyama0
Naoki Nishida0
Date of Patent
June 5, 2007
Patent Application Number
10901633
Date Filed
July 29, 2004
Patent Primary Examiner
Patent abstract
A mask with an opening pattern is placed on a substrate, and etching is carried out by use of anisotropy etching of crystal. The opening pattern of the mask is composed of broken lines, each of which is discontinued by discontinuing portions. By the etching, a birefringence optical element with a fine structure, in which trenches, each of which is discontinued by discontinuing portions, are juxtaposed periodically at a specified pitch, is obtained.
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