Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xuyen Ngoc Pham0
Date of Patent
June 12, 2007
0Patent Application Number
110328520
Date Filed
January 11, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A shower head processes a wafer with a plate having a plurality of nozzles positioned thereon, each of the nozzles assigned to one of a plurality of processing zones for the wafer; and a manifold assembly coupled to each of the nozzles to control one or more of the nozzles as a group in each processing zone.
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