Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert Miller0
Teddie Magbitang0
Victor Lee0
Willi Volksen0
Eva Simonyi0
Geraud Dubois0
Ho-Cheol Kim0
James Hedrick0
Date of Patent
June 12, 2007
0Patent Application Number
110314180
Date Filed
January 7, 2005
0Patent Primary Examiner
Patent abstract
Oxycarbosilane materials make excellent matrix materials for the formation of porous low-k materials using incorporated pore generators(porogens). The elastic modulus numbers measured for porous samples prepared in this fashion are 3–6 times higher than porous organosilicates prepared using the sacrificial porogen route. The oxycarbosilane materials are used to produce integrated circuits for use in electronics devices.
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