Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiromi Kemmoku0
Date of Patent
June 19, 2007
0Patent Application Number
109690720
Date Filed
October 21, 2004
0Patent Primary Examiner
Patent abstract
An exposure apparatus for exposing a subject to a pattern. The apparatus includes an update system to update a parameter necessary for processing in the exposure apparatus through measurement, a setting system to set a validity period of the parameter updated by the update system, and a control system to cause the update system to perform an update based on the validity period. Prior to execution of a unit of the processing, the control system determines whether the update by the update system is to be performed, based on a predicted completion time of the unit and the validity period.
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