Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gary Wyka0
Michael Rice0
Jeff Hudgens0
Iraj Sadighi0
Date of Patent
June 19, 2007
Patent Application Number
10387267
Date Filed
March 11, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
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