Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsuneo Ishigaki0
Date of Patent
June 26, 2007
0Patent Application Number
114318780
Date Filed
May 10, 2006
0Patent Primary Examiner
Patent abstract
A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft. A rotary latch pivotably supported on an inner surface of one of the valve element with the rotary latch having a latch surface at a forward end thereof, wherein when a rotational force is applied to the rotary latch in one direction, the latch surface is pressed against a joint surface of the single shaft, whereby the valve element is latched to said single shaft, and when a rotational force is applied to the rotary latch in the opposite direction, the latch surface is separated from the joint surface of the single shaft to unlatch the valve element.
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