Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toru Fujimori0
Date of Patent
June 26, 2007
0Patent Application Number
103884080
Date Filed
March 17, 2003
0Patent Primary Examiner
Patent abstract
A positive resist composition comprising: (A) a compound capable of generating an acid on exposure to active light rays or a radiation; (B) a resin which is insoluble or sparingly soluble in an alkali and becomes alkali-soluble by an action of an acid; and (D) an acyclic compound having at least three groups selected from a hydroxyl group and a substituted hydroxyl group.
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