US Patent 7238597 Boron ion delivery system
Patent 7238597 was granted and assigned to Brontek Delta Corp. on July, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
James M. Williams0
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Patent abstract
A boron ion plasma, generated by use of a cathodic arc, is manipulated and delivered to a large flat product such as a silicon wafer with boron ion energies suitable for incorporation of boron atoms into solid state devices as one of the key steps in manufacturing solid state electronics and with uniformity of boron dose over the area suitable for the scale of manufacturing desired.
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US Patent 07238597 Boron ion delivery system US Patent 7238597 Boron ion delivery system
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Patent Number
072385970
Patent Number
72385970
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Patent Jurisdiction
Patent Number
072385970
Date of Patent
July 3, 2007
0Patent Application Number
106672770
Date Filed
September 19, 2003
0Official Website
Patent Primary Examiner
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US Patent 07238597 Boron ion delivery system
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07238597
Date of patent
July 3, 2007
Patent application number
10667277
Date Filed
September 19, 2003
Patent primary examiner
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