US Patent 7238627 Organosilicate polymer and insulating film therefrom
Patent 7238627 was granted and assigned to LG Chem on July, 2007 by the United States Patent and Trademark Office.
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Patent abstract
Provided is a process for manufacturing an insulating film for a semiconductor device. The process includes preparing a composition for forming an insulating film, wherein the composition comprises a) an organosilicate polymer and b) an organic solvent. The composition is coated on a substrate of a semiconductor device to prepare a coated insulating film, and the coated insulated film is dried and cured. Also provided are an insulating film prepared as described as well as a semiconductor device comprising the insulating film.
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Official Website
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US Patent 07238627 Organosilicate polymer and insulating film therefrom US Patent 7238627 Organosilicate polymer and insulating film therefrom
Infobox
Patent Number
0723862700
Patent Number
723862700
Edits on 29 Mar, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072386270
Date of Patent
July 3, 2007
0Patent Application Number
111729610
Date Filed
July 5, 2005
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072386270
Date of Patent
July 3, 2007
0Patent Application Number
111729610
Date Filed
July 5, 2005
0Official Website
Patent Primary Examiner
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US Patent 07238627 Organosilicate polymer and insulating film therefrom
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07238627
Date of patent
July 3, 2007
Patent application number
11172961
Date Filed
July 5, 2005
Patent primary examiner
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