US Patent 7239381 Particle detection method
Patent 7239381 was granted and assigned to Micron Technology on July, 2007 by the United States Patent and Trademark Office.
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A method for detecting on a substrate used in the fabrication of integrated devices comprises the steps of (1) contacting the substrate with a monomer, wherein the particle catalyzes the polymerization of the monomer, and (2) detecting the particle using a particle counter. Different types of particles may be distinguished through their different polymerization rates of the monomer. Accordingly, in some certain embodiments, steps (1) and (2) may be repeated, allowing the growth rates of the particles to be determined. A plurality of monomers may be employed to identify different types of particles on the same substrate. The method is useful in detecting copper particles on silicon substrates.
US Patent 07239381 Particle detection method US Patent 7239381 Particle detection method
US Patent 07239381 Particle detection method
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