Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 10, 2007
Patent Application Number
11045217
Date Filed
January 28, 2005
Patent Primary Examiner
Patent abstract
The present invention is directed to a method for transferring substrates by receiving a first substrate at a first substrate receiving station in a first transfer unit capable of holding at least two substrates, moving the first transfer unit containing only the first substrate along a conveying line to a second substrate receiving station, causing the first transfer unit to receive a second substrate at the second substrate receiving station; and transferring the first and second substrates simultaneously to a substrate transfer station.
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