Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Atsushi Shigeta0
Gen Toyota0
Hiroyuki Yano0
Date of Patent
July 10, 2007
0Patent Application Number
110854950
Date Filed
March 22, 2005
0Patent Primary Examiner
Patent abstract
A method of processing a substrate is disclosed, wherein a sidewall surface of a notch portion formed in a circumferential portion of a substrate to be processed is polished by using a cylindrical polishing head rotatable with an axis as a rotational center.
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