Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael V. Wood0
Michael A. Bush0
Donald A. Smith0
Karel Stryczek0
James E. Morgenson0
Date of Patent
July 10, 2007
0Patent Application Number
109726430
Date Filed
October 25, 2004
0Patent Primary Examiner
Patent abstract
Architecture that facilitates management of a semiconductor and/or microelectronics manufacturing process. A manufacturing component in communication with the semiconductor and/or microelectronics process operates according to process conditions to output a product, which manufacturing component at least one of monitors and controls the process using modularized code. A rules engine component processes one or more rules in association with the modularized code to control the process conditions in realtime by balancing process efficiency criteria to arrive at an optimal result.
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