Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Heui-Jae Pahk0
Jong-Ho Park0
Date of Patent
July 17, 2007
0Patent Application Number
104748250
Date Filed
August 6, 2001
0Patent Primary Examiner
Patent abstract
Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanisms are fixed to the base and the motion stage, respectively. Each of the first to third feeding mechanisms has a piezo actuator and two elastic hinges provided at both sides of the piezo actuator. Each of the fourth to sixth feeding mechanisms has a piezo actuator, three hinge members, and a lever member with a notch hinge which operatively cooperates with the hinge members.
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