US Patent 7244113 Scroll pump with controlled axial thermal expansion
Patent 7244113 was granted and assigned to Varian, Inc. on July, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 7, 2004
0
Date of Patent
July 17, 2007
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Patent Application Number
10960673
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Patent Inventor Names
Anthony G. Liepert
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Jeffrey C. Warren
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Robert M. Curry, Jr.
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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