Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
George G. Barclay0
Young C. Bae0
Date of Patent
July 17, 2007
0Patent Application Number
104489610
Date Filed
May 30, 2003
0Patent Primary Examiner
Patent abstract
Provided are new resins that comprise carbocyclic aryl units with hetero substitution units and photoresists that contain such resins. Particularly preferred photoresists of the invention comprise a deblocking resin that contains hydroxy naphthyl units and can be effectively imaged with sub-200 nm radiation such as 193 nm radiation.
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