Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 17, 2007
Patent Application Number
11145060
Date Filed
June 3, 2005
Patent Primary Examiner
Patent abstract
In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS device to replace hydroxyl groups with electrically neutral molecules, thereby converting the dielectric surface from a hydrophilic to a substantially hydrophobic nature. A MEMS device having a surface treated using the aforementioned method is also disclosed.
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