Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 17, 2007
Patent Application Number
10822055
Date Filed
April 8, 2004
Patent Primary Examiner
Patent abstract
An apparatus for detecting particles located on an object includes an emitter for irradiating lights to the particles. The object is disposed on a stage in a direction substantially parallel to a surface of the object. The apparatus further includes a driver for generating a relative motion between the emitter and the object for scanning the surface of the object with the lights and a detector for detecting the lights emitted from the emitter or lights scattered from the particle. With embodiments of the present invention, the particles can be quickly detected.
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