Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Seung-Woo Han0
Shin Hur0
Soon-Gyu Ko0
Byung-Ik Choi0
Chung-Seog Oh0
Hak-Joo Lee0
Jae-Hyun Kim0
Date of Patent
July 24, 2007
0Patent Application Number
114553530
Date Filed
June 19, 2006
0Patent Primary Examiner
Patent abstract
An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow frame having a shape symmetric with respect to a plane including an axis on which the two ends are positioned.
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