US Patent 7246985 Work-piece processing system
Patent 7246985 was granted and assigned to Axcelis Technologies on July, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 16, 2004
0
Date of Patent
July 24, 2007
0
Patent Application Number
10826419
0
Patent Citations Received
Patent Inventor Names
Joseph Ferrara
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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